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Adept Technology Intros Apex Front-End Module

Adept Technology Inc. (San Jose, CA), a manufacturer of flexible automation for the semiconductor, electronics, fiber optic, telecommunications and life sciences industries, announced its new low-cost, wafer-handling module for semiconductor process tools, the Adept Apex™ wafer handling platform, which combines Adept's new direct-drive AWARD™ wafer handling robot along with the Adept SmartServo™ distributed controls architecture. The Adept Apex platform is capable of handling wafer sizes up to 300mm.

"The market is demanding a wafer handling platform that is lower-cost, simpler to understand and support, but that can easily be adapted to meet a customer's unique requirements," said Charlie Duncheon. "We believe the Adept Apex EFEM platform meets all these needs with standard Adept robots and software and our easily expandable, FireWire®-based, controls architecture that allows plug-and-play addition of machine vision, digital and analog I/O, and servo axis control."

Adept Technology Inc.
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