Agilent Technologies Offers New 4070 Series Testers

Agilent Technologies Inc. (Palo Alto, CA) announced two new models of the Agilent 4070 Series test system, the Agilent 4072B and 4073B, which enable semiconductor manufacturers to reduce test time for capacitance measurements and dc measurements in advanced semiconductor wafer manufacturing processes by offering up to 40 percent higher throughput.

The new members of the 4070 Series feature an integrated, high-speed, capacitance meter that is embedded into each test head. The integrated capacitance meter performs measurements up to three times faster than previous models of the 4070 Series, and is the main feature contributing to the overall throughput and productivity improvements of the new test systems. In addition, both new systems feature hardware and firmware enhancements that reduce dc current measurement time by up to 20 percent in ranges 1µA or larger. In typical parametric tests, the 4072B and 4073B provide about 40 percent higher throughput.

The Agilent 4072B is priced at $280,000, and the 4073B is priced at $340,000, including installation and one-time, on-site calibration. Both systems are expected to be available for order in February 2003, and are expected to begin shipping in May 2003.